Development of an Optical Pickup System for Measuring the Displacement of the Micro Cantilever in Scanning Probe Microscope

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/45537

Title:	Development of an Optical Pickup System for Measuring the Displacement of the Micro Cantilever in Scanning Probe Microscope
Authors:	Huang, Kuang-Yuh Hwu, En-Te Chow, Hsin-Yi Hung, Shao-Kan
Issue Date:	2005-05-01
Conference:	International Conference on Mechatronics (Kuala Lumpur, Malaysia : IEEE)
URI:	http://ir.sinica.edu.tw/handle/201000000A/45537
Appears in Collections:	物理研究所

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