http://ir.sinica.edu.tw/handle/201000000A/45438
DC Field | Value | Language |
---|---|---|
dc.contributor | 物理研究所 | - |
dc.contributor.author | Wu, Cen Shawn | - |
dc.contributor.author | Makiuchi, Yoshiyuki | - |
dc.contributor.author | Chen, ChiiDong | - |
dc.date.accessioned | 2020-10-26T07:56:32Z | - |
dc.date.available | 2020-10-26T07:56:32Z | - |
dc.date.issued | 2009 | - |
dc.identifier.uri | http://ir.sinica.edu.tw/handle/201000000A/45438 | - |
dc.description.sponsorship | 物理研究所 | - |
dc.language.iso | en | - |
dc.publisher | IN-TECH | - |
dc.relation.ispartof | Lithography (Vienna, Austria : IN-TECH) | - |
dc.title | High-energy Electron Beam Lithography for Nanoscale Fabrication | - |
dc.type | book chapter | - |
dc.description.note | 出版中(accepted);有審查制度;具代表性 | - |
item.languageiso639-1 | en | - |
item.cerifentitytype | Publications | - |
item.grantfulltext | none | - |
item.openairetype | book chapter | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
Appears in Collections: | 物理研究所 |
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