http://ir.sinica.edu.tw/handle/201000000A/45438| Title: | High-energy Electron Beam Lithography for Nanoscale Fabrication | Authors: | Wu, Cen Shawn Makiuchi, Yoshiyuki Chen, ChiiDong |
Issue Date: | 2009 | Publisher: | IN-TECH | Relation: | Lithography (Vienna, Austria : IN-TECH) | URI: | http://ir.sinica.edu.tw/handle/201000000A/45438 |
| Appears in Collections: | 物理研究所 |
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