Sputter damage in Si (001) surface by combination of C60+ and Ar+ ion beam

請用此 Handle URI 來引用此文件： http://ir.sinica.edu.tw/handle/201000000A/45127

題名:	Sputter damage in Si (001) surface by combination of C60+ and Ar+ ion beam
作者:	Yu, B.-Y. Lin, W.-C. Chen, Y.-Y. Lin, Y.-C. Wong, K.-T. Shyue, J.-J.
公開日期:	2009
關聯:	Appl. Surf. Sci. 255 (Part1), 2490-2493.
URI:	http://ir.sinica.edu.tw/handle/201000000A/45127
ISSN:	http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0169-4332&DestApp=JCR&RQ=IF_CAT_BOXPLOT
顯示於：	原子與分子科學研究所

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