http://ir.sinica.edu.tw/handle/201000000A/44081
Title: | Formation of Crystalline Silicon Carbon Nitride Films by Microwave Plasma-Enhanced Chemical Vapor Deposition | Authors: | Chen, L. C. Yang, C. Y. Bhusari, D. M. Chen, K. H. Lin, M. C. Lin, J. C. Chuang, T. J. |
Issue Date: | 1996 | Relation: | DIAMOND AND RELATED MATERIALS 5, 514-518 | URI: | http://ir.sinica.edu.tw/handle/201000000A/44081 | ISSN: | http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0925-9635&DestApp=JCR&RQ=IF_CAT_BOXPLOT |
Appears in Collections: | 原子與分子科學研究所 |
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