Morphology control of silicon nanotips fabricated by electron cyclotron resonance plasma etching

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/43823

Title:	Morphology control of silicon nanotips fabricated by electron cyclotron resonance plasma etching
Authors:	Hsu, C. H. Huang, Y. F. Chen, L. C. Chattopadhyaya, S. Chen, K. H. Lo, H. C. Chen, C. F.
Issue Date:	2006
Relation:	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 24,308-311
URI:	http://ir.sinica.edu.tw/handle/201000000A/43823
ISSN:	http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=1071-1023&DestApp=JCR&RQ=IF_CAT_BOXPLOT
Appears in Collections:	原子與分子科學研究所

Show full item record

Last Week
0

Last month

checked on Jan 1, 2023

Check