Improvement of the Gas Cluster Ion Beam- (GCIB)-Based Molecular Secondary Ion Mass Spectroscopy (SIMS) Depth Profile with O2+ Cosputtering

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/34251

Title:	Improvement of the Gas Cluster Ion Beam- (GCIB)-Based Molecular Secondary Ion Mass Spectroscopy (SIMS) Depth Profile with O2+ Cosputtering
Authors:	Yi-Hsuan Chu Hua-Yang Liao Kang-Yi Lin Hsun-Yun Chang Wei-Lun Kao Ding-Yuan Kuo Yun-Wen You Kuo-Jui Chu Chen-Yi Wu Jing-Jong Shyue
Issue Date:	2016
Relation:	ANALYST 141(8), 2523-2533
URI:	http://ir.sinica.edu.tw/handle/201000000A/34251
ISSN:	http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0003-2654&DestApp=JCR&RQ=IF_CAT_BOXPLOT
Appears in Collections:	應用科學研究中心

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