http://ir.sinica.edu.tw/handle/201000000A/33879
Title: | A single-layer PDMS-on-silicon hybrid micro actuator with multi-axis out-of-plane motion capabilities, Part II: fabrication and characterization | Authors: | Tung, YC Kurabayashi, K |
Issue Date: | 2005-06-01 | Relation: | Journal of Microelectromechanical Systems 14(3), 558-566 | URI: | http://ir.sinica.edu.tw/handle/201000000A/33879 | ISSN: | http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=1057-7157&DestApp=JCR&RQ=IF_CAT_BOXPLOT |
Appears in Collections: | 應用科學研究中心 |
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