http://ir.sinica.edu.tw/handle/201000000A/33353
Title: | Finite-element Green's function approach for CD metrology of 3D gratings on multilayer films | Authors: | Chang, Y. -C. Li, G. Chu, H. Opsal, J. |
Issue Date: | 2006 | Relation: | J. Opt. Soc. A 23, 638 | URI: | http://ir.sinica.edu.tw/handle/201000000A/33353 |
Appears in Collections: | 應用科學研究中心 |
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