Issue Date | Title | Author(s) | Relation | scopus | WOS | Fulltext/Archive link |
---|---|---|---|---|---|---|
2000 | Effect of carbon sources on silicon carbon nitride films growth in an electron cyclotron resonance plasma chemical vapor deposition reactor | Wu, J. J.; Chen, K. H.; Wen, C. -Y.; Chen, L. C.; Lo, H. J.; Lin, S. T. | DIAMOND AND RELATED MATERIALS 9, 556-561 | |||
1999 | Methylamine growth of SiCN films using ECR-CVD | Wen, C. Y.; Wu, J. J.; Lo, H. J.; Chen, L. C.; Chen, K. H.; Lin, S. T.; Yu, Y. -C.; Wang, C. -W.; Lin, E. -K. | MRS Online Proceedings Library 606, 115 |