Issue Date | Title | Author(s) | Relation | scopus | WOS | Fulltext/Archive link |
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2006 | Morphology control of silicon nanotips fabricated by electron cyclotron resonance plasma etching | Hsu, C. H.; Huang, Y. F.; Chen, L. C.; Chattopadhyaya, S.; Chen, K. H.; Lo, H. C.; Chen, C. F. | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 24,308-311 |