公開日期 | 題名 | 作者 | 關聯 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
1999 | Silicon Carbon Nitride Films Deposited by ECR CVD | Chen, K. H.; Wu, J. J.; Wen, C. Y.; Chen, L. C.; Fan, C. W.; Kuo, P. F.; Chen, Y. F.; Huang, Y. S. | State-0f-the-Art Program on Compound Semiconductors XXX, 99, 13-24, Ed. C.R. Abernathy et al. | |||
1999 | Wide Band Gap Silicon Carbon Nitride Films Deposited by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition | Chen, K. H.; Wu, J. J.; Wen, C. Y.; Chen, L. C.; Fan, C. W.; Kuo, P. F.; Chen, Y. F.; Huang, Y. S. | THIN SOLID FILMS 355-356, 205-209 |