Astigmatic Detection System with Feedback Mechanism for Calibrating Driving Waveform of Piezoelectric Actuators

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/90649

Title:	Astigmatic Detection System with Feedback Mechanism for Calibrating Driving Waveform of Piezoelectric Actuators
Authors:	Hsien-Shun Liao Zheng-Rong Guo Hong-Sheng Tan Kuang-Yuh Huang Ing-Shouh Hwang En-Te Hwu
Issue Date:	2023-08-01
Relation:	IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 72, 1007907
URI:	http://ir.sinica.edu.tw/handle/201000000A/90649
URL:	https://ieeexplore.ieee.org/document/10198319
Appears in Collections:	物理研究所

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