Surface micromachining on a polymethylmethacrylate substrate using visible laser-induced backside wet etching with a KMnO4 solution as an absorber

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/81557

Title:	Surface micromachining on a polymethylmethacrylate substrate using visible laser-induced backside wet etching with a KMnO4 solution as an absorber
Authors:	Chang, Hui-Fang Yeung, Wing Kiu Kao, Wei-Chen Ehrhardt, Martin Zimmer, Klaus Cheng, Ji-Yen
Issue Date:	2020-03
Relation:	Journal of Laser Applications 32(2), 022014
URI:	http://ir.sinica.edu.tw/handle/201000000A/81557
ISSN:	http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=1042-346X&DestApp=JCR&RQ=IF_CAT_BOXPLOT
URL:	http://dx.doi.org/10.2351/1.5114659
Appears in Collections:	應用科學研究中心

Show full item record

Last Week
0

Last month
0

checked on Jan 4, 2023

Check