http://ir.sinica.edu.tw/handle/201000000A/47351| Title: | Temperature effect study of Silicon-on-insulator structures prepared by high dose implantation of nitrogen | Authors: | Huang, R. T. Hsu, J. Y. Huang, J. W. Yu, Y. C. |
Issue Date: | 2011-04-01 | Relation: | Nuclear Instruments and Methods in Phys. Research B269, 3212-3216 | URI: | http://ir.sinica.edu.tw/handle/201000000A/47351 |
| Appears in Collections: | 物理研究所 |
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