Electron-Beam Lithography of Microbowtie Structures for Next Generation Optical Probe

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/46681

Title:	Electron-Beam Lithography of Microbowtie Structures for Next Generation Optical Probe
Authors:	Tseng, Ampere A. Chen, C. D. Wu, C. S. Diaz, Rodolfo E. Watts, Michael E.
Issue Date:	2002
Relation:	JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS1, 123-135
URI:	http://ir.sinica.edu.tw/handle/201000000A/46681
Appears in Collections:	物理研究所

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