Milling yield estimation in focused ion beam milling of two-layer substrates

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/46674

Title:	Milling yield estimation in focused ion beam milling of two-layer substrates
Authors:	Tseng, Ampere A Insua, Ivan A Park, Jong-Seung Chen, Chii D
Issue Date:	2005
Relation:	JOURNAL OF MICROMECHANICS AND MICROENGINEERING15, 20
URI:	http://ir.sinica.edu.tw/handle/201000000A/46674
Appears in Collections:	物理研究所

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