Compact MEMS/NEMS Characterization Platform Using a DVD Optical Pick-up Unit with Optical Imaging Function

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/45542

Title:	Compact MEMS/NEMS Characterization Platform Using a DVD Optical Pick-up Unit with Optical Imaging Function
Authors:	Chen, Ching-Hsiu Larsen, Peter Emil Schmid, Silvan Liao, Hsien-Shun Huang, Kuang-Yuh Hwang, Ing-Shouh Boisen, Anja Hwu, En-Te
Issue Date:	2013-05-01
Conference:	TechConnect World 2013 (Washington, United states : TechConnect)
URI:	http://ir.sinica.edu.tw/handle/201000000A/45542
Appears in Collections:	物理研究所

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