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  1. Scholars Hub of the Academia Sinica
  2. 數理科學組
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Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/45542
Title: Compact MEMS/NEMS Characterization Platform Using a DVD Optical Pick-up Unit with Optical Imaging Function
Authors: Chen, Ching-Hsiu
Larsen, Peter Emil
Schmid, Silvan
Liao, Hsien-Shun
Huang, Kuang-Yuh
Hwang, Ing-Shouh
Boisen, Anja
Hwu, En-Te
Issue Date: 2013-05-01
Conference: TechConnect World 2013 (Washington, United states : TechConnect)
URI: http://ir.sinica.edu.tw/handle/201000000A/45542
Appears in Collections:物理研究所

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