http://ir.sinica.edu.tw/handle/201000000A/45530
Title: | Anti-drift and Auto-alignment Mechanism for an Astigmatic Detection System | Authors: | Hwu, En-Te Illers, Hartmut Jusko, Lutz Hwang, Ing-Souh Danzebrink, Hans-Ulrich |
Issue Date: | 2010-05-01 | Conference: | 12th ISPM (Sapporo, Japan : Institute of Industrial Science, University of Tokyo) | URI: | http://ir.sinica.edu.tw/handle/201000000A/45530 |
Appears in Collections: | 物理研究所 |
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