http://ir.sinica.edu.tw/handle/201000000A/44572
Title: | Global Model for High Pressure Electronegative Radio-frequency Discharges | Authors: | Y. T. Lee M. A. Leiberman A. J. Lichtenberg F. Bose H. Baltes R. Patrick |
Issue Date: | 1997 | Relation: | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 15(1), 113-126 | URI: | http://ir.sinica.edu.tw/handle/201000000A/44572 | ISSN: | http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0734-2101&DestApp=JCR&RQ=IF_CAT_BOXPLOT |
Appears in Collections: | 原子與分子科學研究所 |
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