http://ir.sinica.edu.tw/handle/201000000A/44062
Title: | Sputtering Process of Carbon Nitride Films by Using a Novel Bio-Molecular C-N Containing Target | Authors: | Lu, T. R. Chen, L. C. Chen, K. H. Bhusari, D. M. Chen, T. M. Kuo, C. T. |
Issue Date: | 1998 | Relation: | THIN SOLID FILMS 332, 74-79 | URI: | http://ir.sinica.edu.tw/handle/201000000A/44062 | ISSN: | http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0040-6090&DestApp=JCR&RQ=IF_CAT_BOXPLOT |
Appears in Collections: | 原子與分子科學研究所 |
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