http://ir.sinica.edu.tw/handle/201000000A/44054
Title: | Wide Band Gap Silicon Carbon Nitride Films Deposited by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition | Authors: | Chen, K. H. Wu, J. J. Wen, C. Y. Chen, L. C. Fan, C. W. Kuo, P. F. Chen, Y. F. Huang, Y. S. |
Issue Date: | 1999 | Relation: | THIN SOLID FILMS 355-356, 205-209 | URI: | http://ir.sinica.edu.tw/handle/201000000A/44054 | ISSN: | http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0040-6090&DestApp=JCR&RQ=IF_CAT_BOXPLOT |
Appears in Collections: | 原子與分子科學研究所 |
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