High-quality Surface Micromachining on Polymer using Visible-LIBWE

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/34722

Title:	High-quality Surface Micromachining on Polymer using Visible-LIBWE
Authors:	J.Y. Cheng W.C. Hsu W.C. Kao M. Mousavi
Issue Date:	2015-05-25
Conference:	LPM2015- The 16th International Symposium on Laser Precision Microfabrication and HPL2013- The 7th International Symposium on High Power Laser Processing (日本福岡 : Japan Laser Processing Society (JLPS) Japan)
URI:	http://ir.sinica.edu.tw/handle/201000000A/34722
Appears in Collections:	應用科學研究中心

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