Effects of O2- and N2-Plasma Treatments on Copper Surface

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/34026

Title:	Effects of O2- and N2-Plasma Treatments on Copper Surface
Authors:	C.C. Chiang M.C. Chen L.J. Li Z.C. Wu S.M. Jang M.S. Liang
Issue Date:	2004
Relation:	JAPANESE JOURNAL OF APPLIED PHYSICS 43, 7415
URI:	http://ir.sinica.edu.tw/handle/201000000A/34026
ISSN:	http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0021-4922&DestApp=JCR&RQ=IF_CAT_BOXPLOT
Appears in Collections:	應用科學研究中心

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