Evaluation of microstructures and mechanical properties of diamond like carbon films deposited by filtered cathodic arc plasma

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/81229

Title:	Evaluation of microstructures and mechanical properties of diamond like carbon films deposited by filtered cathodic arc plasma
Authors:	Tsai, Pi-Chuen Chen, Kuei-Hsien
Issue Date:	2008-06
Relation:	Thin Solid Films 516(16), 5440-5444
URI:	http://ir.sinica.edu.tw/handle/201000000A/81229
URL:	http://dx.doi.org/10.1016/j.tsf.2007.07.060
Appears in Collections:	原子與分子科學研究所

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