Deep-patterning of complex oxides by focused ion beam with PMMA assisted hybrid protective layer

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/80970

Title:	Deep-patterning of complex oxides by focused ion beam with PMMA assisted hybrid protective layer
Authors:	Jessie Shiue Pai-Chia Kuo
Issue Date:	2020
Relation:	Nano Express 1(2), 020032
URI:	http://ir.sinica.edu.tw/handle/201000000A/80970
Appears in Collections:	物理研究所

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