http://ir.sinica.edu.tw/handle/201000000A/73920
Title: | Atomic Layer Etching of Large-area 2D Materials | Authors: | Chia-Wei Liu Kuan-Chao Chen Shih-Yen Lin |
Issue Date: | 2018-12-06 | Conference: | OPTIC 2018 (Tainan, Taiwan : NCTU) | URI: | http://ir.sinica.edu.tw/handle/201000000A/73920 |
Appears in Collections: | 應用科學研究中心 |
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