http://ir.sinica.edu.tw/handle/201000000A/47350
Title: | A TEM investigation of retained defects in Si wafer by 1MeV Si ions bombardment | Authors: | Hsu, J. Y. Huang, R. T. Huang, M. J. Yu, Y. C. |
Issue Date: | 2010-06-01 | Relation: | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS268, 2193-2196 | URI: | http://ir.sinica.edu.tw/handle/201000000A/47350 |
Appears in Collections: | 物理研究所 |
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