http://ir.sinica.edu.tw/handle/201000000A/46665| Title: | High-energy Electron Beam Lithography for Nanoscale Fabrication | Authors: | Wu, Cen Shawn Makiuchi, Yoshiyuki Chen, ChiiDong |
Issue Date: | 2010-02-01 | Relation: | Lithographypp. 241-266 | URI: | http://ir.sinica.edu.tw/handle/201000000A/46665 |
| Appears in Collections: | 物理研究所 |
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