http://ir.sinica.edu.tw/handle/201000000A/46630
Title: | Electron beam lithography in nanoscale fabrication: recent development | Authors: | Tseng, A. A. Chen, Kuan Chen, C. D. Ma, K. J. |
Issue Date: | 2003-04-01 | Relation: | IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING26(2), 141-149 | URI: | http://ir.sinica.edu.tw/handle/201000000A/46630 |
Appears in Collections: | 物理研究所 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.