Self-aligned cantilever positioning for on-substrate measurements using DVD pickup head

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/46399

Title:	Self-aligned cantilever positioning for on-substrate measurements using DVD pickup head
Authors:	Bosco, F. G. Hwu, E. -T. Keller, S. Greve, A. Boisen, A.
Issue Date:	2010-03-01
Relation:	MICROELECTRONIC ENGINEERING87,708-711
URI:	http://ir.sinica.edu.tw/handle/201000000A/46399
URL:	http://www.sciencedirect.com/science/article/pii/S0167931709009071
Appears in Collections:	物理研究所

Show full item record

Last Week
0

Last month
0

checked on Jan 2, 2023

Check