SMM Actuator for Nano-Scale Positioning

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/45540

Title:	SMM Actuator for Nano-Scale Positioning
Authors:	Hu, E. T. Huang, K. Y. Hwang, I. S.
Issue Date:	2004-10-01
Conference:	OpticsEast Conference on International Society for Optical Engineering (Philadelphia, USA : SPIE)
URI:	http://ir.sinica.edu.tw/handle/201000000A/45540
Appears in Collections:	物理研究所

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