http://ir.sinica.edu.tw/handle/201000000A/45529
Title: | Self aligned cantilever positioning for on-substrate measurements using commercial DVD optical pickup head | Authors: | Bosco, F. Hwu, E. -T. Keller, S. Boisen, A. |
Issue Date: | 2009-09-01 | Conference: | 35th MNE '09 International Conference on Micro and Nano Engineering (Ghent, Belgium : IEEE) | URI: | http://ir.sinica.edu.tw/handle/201000000A/45529 |
Appears in Collections: | 物理研究所 |
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