X-ray absorption of Si–C–N thin films: A comparison between crystalline and amorphous phases

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/44048

Title:	X-ray absorption of Si–C–N thin films: A comparison between crystalline and amorphous phases
Authors:	Chang, Y. K. Hsieh, H. H. Pong, W. F. Tsai, M. H. Dann, T. E. Chien, F. Z. Tseng, P. K. Chen, L. C. Wei, S. L. Chen, K. H. Wu, J. J. Chen, Y. F.
Issue Date:	1999-11
Relation:	Journal of Applied Physics 86(10), 5609-5613
URI:	http://ir.sinica.edu.tw/handle/201000000A/44048
ISSN:	http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0021-8979&DestApp=JCR&RQ=IF_CAT_BOXPLOT
URL:	http://dx.doi.org/10.1063/1.371568
Appears in Collections:	原子與分子科學研究所

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