http://ir.sinica.edu.tw/handle/201000000A/44047
Title: | Deposition of silicon carbon nitride films by ion beam sputtering | Authors: | Wu, J. J. Wu, C. T. Liao, Y. C. Lu, T. R. Chen, L. C. Chen, K. H. Hwa, L. G. Kuo, C. T. Ling, K. J. |
Issue Date: | 1999 | Relation: | THIN SOLID FILMS 355, 417-422 | URI: | http://ir.sinica.edu.tw/handle/201000000A/44047 | ISSN: | http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0040-6090&DestApp=JCR&RQ=IF_CAT_BOXPLOT |
Appears in Collections: | 原子與分子科學研究所 |
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