http://ir.sinica.edu.tw/handle/201000000A/44036| DC Field | Value | Language |
|---|---|---|
| dc.contributor | 原子與分子科學研究所 | - |
| dc.contributor.author | Wen, C. Y. | - |
| dc.contributor.author | Wu, J. J. | - |
| dc.contributor.author | Lo, H. J. | - |
| dc.contributor.author | Chen, L. C. | - |
| dc.contributor.author | Chen, K. H. | - |
| dc.contributor.author | Lin, S. T. | - |
| dc.contributor.author | Yu, Y. -C. | - |
| dc.contributor.author | Wang, C. -W. | - |
| dc.contributor.author | Lin, E. -K. | - |
| dc.date.accessioned | 2020-10-26T03:22:16Z | - |
| dc.date.available | 2020-10-26T03:22:16Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://ir.sinica.edu.tw/handle/201000000A/44036 | - |
| dc.description.sponsorship | 原子與分子科學研究所 | - |
| dc.language.iso | en | - |
| dc.relation.ispartof | MRS Online Proceedings Library 606, 115 | - |
| dc.title | Methylamine growth of SiCN films using ECR-CVD | - |
| dc.type | journal article | - |
| dc.description.note | 已出版;有審查制度;具代表性 | - |
| item.fulltext | no fulltext | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.grantfulltext | none | - |
| item.openairetype | journal article | - |
| item.languageiso639-1 | en | - |
| item.cerifentitytype | Publications | - |
| Appears in Collections: | 原子與分子科學研究所 | |
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