http://ir.sinica.edu.tw/handle/201000000A/44025
Title: | Bonding characterization and nano-indentation study of the amorphous SiCxNy films with and without hydrogen incorporation | Authors: | Lo, H. C. Wu, J. J. Wen, C. Y. Wong, T. S. Lin, S. T. Chen, K. H. Chen, L. C. |
Issue Date: | 2001 | Relation: | DIAMOND AND RELATED MATERIALS 10, 1916-1920 | URI: | http://ir.sinica.edu.tw/handle/201000000A/44025 | ISSN: | http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0925-9635&DestApp=JCR&RQ=IF_CAT_BOXPLOT |
Appears in Collections: | 原子與分子科學研究所 |
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