Ion beam sputtered growth and mechanical properties of SiCN films

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/44017

Title:	Ion beam sputtered growth and mechanical properties of SiCN films
Authors:	Wang, C. T. Ma, K. J. Chen, K. H. Chen, L. C. Kichambare, P. D.
Issue Date:	2001
Relation:	JOURNAL OF MATERIALS SCIENCE AND ENGINEERING 33, 38-43
URI:	http://ir.sinica.edu.tw/handle/201000000A/44017
Appears in Collections:	原子與分子科學研究所

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