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  1. The Academia Sinica Institutional Repository
  2. 數理科學組
  3. 原子與分子科學研究所
Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/43998
Title: Bonding characterization, density measurement, and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin films
Authors: Chattopadhyay, S.
Chen, L. C.
Chien, S. C.
Lin, S. T.
Chen, K. H.
Issue Date: 2002
Relation: JOURNAL OF APPLIED PHYSICS 92, 5150-5158
URI: http://ir.sinica.edu.tw/handle/201000000A/43998
ISSN: http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0021-8979&DestApp=JCR&RQ=IF_CAT_BOXPLOT
Appears in Collections:原子與分子科學研究所

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