http://ir.sinica.edu.tw/handle/201000000A/43961
Title: | Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching | Authors: | Mendoza-Galván, Arturo Järrendahl, Kenneth Arwin, Hans Huang, Yi-Fan Chen, L. C. Chen, K. H. |
Issue Date: | 2009 | Relation: | APPLIED OPTICS 48, 4996-5004 | URI: | http://ir.sinica.edu.tw/handle/201000000A/43961 | ISSN: | http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=1559-128X&DestApp=JCR&RQ=IF_CAT_BOXPLOT |
Appears in Collections: | 原子與分子科學研究所 |
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