Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/43845

Title:	Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering
Authors:	S. C. Chien S. Chattopadhyay L. C. Chen S. T. Lin K. H. Chen
Issue Date:	2003-09
Relation:	Diamond and Related Materials 12(9), 1463-1471
URI:	http://ir.sinica.edu.tw/handle/201000000A/43845
ISSN:	http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0925-9635&DestApp=JCR&RQ=IF_CAT_BOXPLOT
URL:	http://dx.doi.org/10.1016/s0925-9635(03)00175-4
Appears in Collections:	原子與分子科學研究所

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