Enabling Low Power BEOL Compatible monolithic 3D+ nanoelectronics for IoTs Using Local and Selective Far-Infrared Ray Laser Anneal Technology

Please use this identifier to cite or link to this item: http://ir.sinica.edu.tw/handle/201000000A/34745

Title:	Enabling Low Power BEOL Compatible monolithic 3D+ nanoelectronics for IoTs Using Local and Selective Far-Infrared Ray Laser Anneal Technology
Authors:	Chih-Chao Yang Jia-Min Shieh Tung-Ying Hsieh Wen-Hsien Huang Hsing-Hsiang Wang Chang-Hong Shen Tsung-Ta Wu Yun-Fang Hou Yi-Ju Chen Yao-Jen Lee Min-Cheng Chen Fu-Liang Yang Yu-Hsiu Chen Meng-Chyi Wu Wen-Kuan Yeh
Issue Date:	2015-12-07
Conference:	International Electron Devices Meeting (IEDM) (Washington, DC, USA : IEEE)
URI:	http://ir.sinica.edu.tw/handle/201000000A/34745
Appears in Collections:	應用科學研究中心

Show full item record

Last Week
0

Last month
0

checked on Jan 4, 2023

Check