http://ir.sinica.edu.tw/handle/201000000A/34144| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor | 應用科學研究中心 | - |
| dc.contributor.author | Yao-Jen Lee | - |
| dc.contributor.author | Ta-Chun Cho | - |
| dc.contributor.author | Shang-Shiun Chuang | - |
| dc.contributor.author | Fu-Kuo Hsueh | - |
| dc.contributor.author | Yu-Lun Lu | - |
| dc.contributor.author | Po-Jung Sung | - |
| dc.contributor.author | Hsiu-Chih Chen | - |
| dc.contributor.author | Michael I. Current | - |
| dc.contributor.author | Tseung-Yuen Tseng | - |
| dc.contributor.author | Tien-Sheng Chao | - |
| dc.contributor.author | Chenming Hu | - |
| dc.contributor.author | Fu-Liang Yang | - |
| dc.date.accessioned | 2020-10-20T02:57:24Z | - |
| dc.date.available | 2020-10-20T02:57:24Z | - |
| dc.date.issued | 2014-03 | - |
| dc.identifier.issn | http://gateway.isiknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=Drexel&SrcApp=hagerty_opac&KeyRecord=0018-9383&DestApp=JCR&RQ=IF_CAT_BOXPLOT | - |
| dc.identifier.uri | http://ir.sinica.edu.tw/handle/201000000A/34144 | - |
| dc.description.sponsorship | 應用科學研究中心 | - |
| dc.language.iso | en | - |
| dc.relation.ispartof | IEEE TRANSACTIONS ON ELECTRON DEVICES 61, NO.3 | - |
| dc.title | Low-Temperature Microwave Annealing Processes for Future IC Fabrication—A Review | - |
| dc.type | journal article | - |
| dc.description.note | 已出版;[SCI];有審查制度;具代表性 | - |
| item.openairetype | journal article | - |
| item.cerifentitytype | Publications | - |
| item.fulltext | no fulltext | - |
| item.languageiso639-1 | en | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.grantfulltext | none | - |
| 顯示於： | 應用科學研究中心 | |
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