Issue Date | Title | Author(s) | Relation | scopus | WOS | Fulltext/Archive link |
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2014 | Low-Temperature Microwave Annealing Processes for Future IC Fabrication—A Review | Yao-Jen Lee; Ta-Chun Cho; Shang-Shiun Chuang; Fu-Kuo Hsueh; Yu-Lun Lu; Po-Jung Sung; Hsiu-Chih Chen; Michael I. Current; Tseung-Yuen Tseng; Tien-Sheng Chao; Chenming Hu; Fu-Liang Yang | IEEE TRANSACTIONS ON ELECTRON DEVICES 61, NO.3 |