公開日期 | 題名 | 作者 | 關聯 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2007 | Fabrication of high-aspect-ratio silicon nanopillar arrays with the conventional reactive ion etching technique | Chang, Yu-Fen; Chou, Qiong-Ru; Lin, Jiunn-Yuan; Lee, Chau-Hwang | APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 86, 193-196 | |||
2006 | Optimized reactive ion etching process for the fabrication of high-aspect-ratio silicon nanopillar arrays | Chang, Yu-Fen; Chou, Qiong-Ru; Lin, Jiunn-Yuan; Lee, Chau-Hwang |