| Issue Date | Title | Author(s) | Relation | scopus | WOS | Fulltext/Archive link |
|---|---|---|---|---|---|---|
| 2018 | Atomic Layer Etching of Large-area 2D Materials | Chia-Wei Liu; Kuan-Chao Chen; Shih-Yen Lin | ||||
| 2018 | Atomic-layer etching of transition metal dichalcogenides and equivalent selective etching of their hetero-structures | Kuan-Chao Chen; Chia-Wei Liu; Si-Chen Lee; Shih-Yen Lin | ||||
| 2019 | The atomic layer etching of molybdenum disulfides using low-power oxygen plasma | Kuan-Chao Chen; Chia-Wei Liu; Chi Chen; Shih-Yen Lin | Semiconductor Science and Technology 34(4), 045007 |
