Issue Date | Title | Author(s) | Relation | scopus | WOS | Fulltext/Archive link |
---|---|---|---|---|---|---|
2009 | High-energy Electron Beam Lithography for Nanoscale Fabrication | Wu, Cen Shawn; Makiuchi, Yoshiyuki; Chen, ChiiDong | Lithography (Vienna, Austria : IN-TECH) | |||
2010 | High-energy Electron Beam Lithography for Nanoscale Fabrication | Wu, Cen Shawn; Makiuchi, Yoshiyuki; Chen, ChiiDong | Lithographypp. 241-266 |